Hexamethyldisilazane CAS 999-97-3

Hexamethyldisilazane (HMDS) is an important organosilicon compound, most commonly used as a primer layer to increase the adhesion of photoresist to wafer surfaces. It is flammable with a flash point of 6.7°C and is explosive at concentrations of 0.8%-16% in air. HMDS reacts strongly with water, alcohol, and mineral acids to release ammonia (NH3) and form hexamethyldisilazane. In the presence of a catalyst, it reacts with alcohols or phenols to form trimethylalkoxysilanes or trimethylaryloxysilanes. It reacts with anhydrous hydrogen chloride to release NH3 or NH4Cl, forming trimethylchlorosilane.

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Model:
999-97-3
Brand:
bosschem
Code:
999-97-3

Product Description

Hexamethyldisilazane Basic information
Product Name:	Hexamethyldisilazane
CAS:	999-97-3
MF:	C6H19NSi2
MW:	161.39
EINECS:	213-668-5
Mol File:	999-97-3.mol
Hexamethyldisilazane Chemical Properties
Melting point	-78 °C
Boiling point	125 °C (lit.)
density	0.774 g/mL at 25 °C(lit.)
vapor density	4.6 (vs air)
vapor pressure	20 hPa (20 °C)
refractive index	n20/D 1.407(lit.)
Fp	57.2 °F
storage temp.	Store below +30°C.
solubility	Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene.
form	Liquid
pka	30(at 25℃)
Specific Gravity	0.774
color	Colorless
Odor	Ammonia odour
PH Range	8.5
explosive limit	0.8-25.9%(V)
Water Solubility	REACTS
Sensitive	Moisture Sensitive
Hydrolytic Sensitivity	7: reacts slowly with moisture/water
Merck	144,689
BRN	635752
Henry's Law Constant	1.1×10-1 mol/(m3Pa) at 25℃, HSDB (2015)
InChI	1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChIKey	FFUAGWLWBBFQJT-UHFFFAOYSA-N
SMILES	C[Si](C)(C)N[Si](C)(C)C
LogP	0.23-1.19 at 20-25℃
CAS DataBase Reference	999-97-3(CAS DataBase Reference)
NIST Chemistry Reference	Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3)
EPA Substance Registry System	Hexamethyldisilazane (999-97-3)