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| Hexamethyldisilazane (HMDS) is an important organosilicon compound, most commonly used as a primer layer to increase the adhesion of photoresist to wafer surfaces. It is flammable with a flash point of 6.7°C and is explosive at concentrations of 0.8%-16% in air. HMDS reacts strongly with water, alcohol, and mineral acids to release ammonia (NH3) and form hexamethyldisilazane. In the presence of a catalyst, it reacts with alcohols or phenols to form trimethylalkoxysilanes or trimethylaryloxysilanes. It reacts with anhydrous hydrogen chloride to release NH3 or NH4Cl, forming trimethylchlorosilane. | |||||||||
999-97-3
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999-97-3
Hexamethyldisilazane Basic information | |
Product Name: | Hexamethyldisilazane |
CAS: | 999-97-3 |
MF: | C6H19NSi2 |
MW: | 161.39 |
EINECS: | 213-668-5 |
Mol File: | 999-97-3.mol |
Hexamethyldisilazane Chemical Properties | |
Melting point | -78 °C |
Boiling point | 125 °C (lit.) |
density | 0.774 g/mL at 25 °C(lit.) |
vapor density | 4.6 (vs air) |
vapor pressure | 20 hPa (20 °C) |
refractive index | n20/D 1.407(lit.) |
Fp | 57.2 °F |
storage temp. | Store below +30°C. |
solubility | Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene. |
form | Liquid |
pka | 30(at 25℃) |
Specific Gravity | 0.774 |
color | Colorless |
Odor | Ammonia odour |
PH Range | 8.5 |
explosive limit | 0.8-25.9%(V) |
Water Solubility | REACTS |
Sensitive | Moisture Sensitive |
Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
Merck | 144,689 |
BRN | 635752 |
Henry's Law Constant | 1.1×10-1 mol/(m3Pa) at 25℃, HSDB (2015) |
InChI | 1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3 |
InChIKey | FFUAGWLWBBFQJT-UHFFFAOYSA-N |
SMILES | C[Si](C)(C)N[Si](C)(C)C |
LogP | 0.23-1.19 at 20-25℃ |
CAS DataBase Reference | 999-97-3(CAS DataBase Reference) |
NIST Chemistry Reference | Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3) |
EPA Substance Registry System | Hexamethyldisilazane (999-97-3) |
